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#ALDALE2027
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  • Overview
    • Awards
      • ALD Innovator Awardee
      • ALD Outstanding Presentation Award
      • ALD Young Investigator Award
      • ALD Students Awards
      • ALE Student Awards
      • JVST A Best ALD and ALE Paper Award
    • Code of Conduct (PDF)
    • Committee
    • Manuscripts
    • Photo Gallery
      • Photo Gallery 2025
      • Photo Booth 2025
      • Photo Gallery 2024
      • Photo Gallery 2023
      • Photo Gallery 2022
      • AVS Photo Gallery
  • Abstract Submission
    • Copyright Agreement (PDF)
  • Housing & Travel
    • About Dresden
    • Conference Hotel
    • Transportation
    • Travel Requirements
  • Program
    • Invited Speakers
      • Plenary Speaker
      • ALD & ALD Joint Invited Speakers
      • ALD Invited Speakers
      • ALE Invited Speakers
      • Tutorial Speakers
    • Presentation Guidelines
  • Sponsors & Exhibitors
    • Exhibitors
    • Sponsors
    • Sponsor & Exhibit Prospectus Preview (PDF)

Overview

The AVS 27th International Conference on Atomic Layer Deposition (ALD 2027) featuring the 14th International Atomic Layer Etching Workshop (ALE 2027) will be a three-day meeting dedicated to the science and technology of atomic layer controlled deposition of thin films and atomic layer etching.  Since 2001, the ALD conference has been held alternately in the United States, Europe and Asia, allowing fruitful exchange of ideas, know-how and practices between scientists. The conference will take place Sunday, June 20-Wednesday, June 23, 2027, Dresden, Germany.

As in past conferences, the meeting will be preceded (Sunday, June 20) by one day of tutorials and perspectives and a welcome reception. Sessions will take place (Monday-Wednesday, June 20-23) along with an industry tradeshow. All presentations will be audio-recorded and provided to attendees following the conference (posters will be included as PDFs). Anticipated attendance is 700+. View List of Invited Speakers

Abstract Submission

Abstract Submission Deadline:
February 4, 2027

SUBMIT ABSTRACT

ALD Program Chairs

ALE Program Chairs

Program Chair:
Anjana Devi
(Leibniz Institute, IFW Dresden, Germany)

Program Co-Chair:
TBD
(TBD)

Program Chair:
TBD
(TBD)

Program Co-Chair:
TBD
(TBD)

Key Dates

Abstract Submission Deadline:
February 4, 2027
Author Acceptance Notifications:
March 16, 2027
Early Registration Deadline:
May 5, 2027
Hotel Reservation Deadline:
May 5, 2027
Manuscript Deadline:
November 1, 2027

Future Dates

ALD/ALE 2027:
June 20-23, 2027
Dresden, Germany
ALD/ALE 2028:
TBD USA

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Key Dates

Abstract Submission Deadline:
February 4, 2027

Author Acceptance Notifications:
March 16, 2027

Early Registration Deadline:
May 5, 2027

Hotel Reservation Deadline:
May 5, 2027

Manuscript Deadline:
November 1, 2027

Downloads

  • Code of Conduct (PDF)
  • Copyright Agreement (PDF)
  • Presentation Guidelines
  • Sponsor & Exhibit Form (PDF)

Contact

AVS
Della Miller

Event Manager
110 Yellowstone Dr. Suite 120
Chico, CA 95973
(530) 896-0477
della@avs.org

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